专利名称：Capacitor for an integrated circuit发明人：Larry Bruce Fritzinger,Nace Layadi,Sailesh
Mansinh Merchant,Pradip Kumar Roy
申请号：US09250500申请日：19990216公开号：US06720604B1公开日：20040413
专利附图：
摘要：The present invention provides a capacitor comprising a conductive plugcomprising a top surface and exposed sidewalls, wherein the sidewalls comprise a layerselected from the group consisting of titanium and titanium nitride, and an electrode
material layer over the conductive plug sidewalls, wherein the layer of electrode materialis not titanium nor titanium nitride.
申请人：AGERE SYSTEMS INC.
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容