专利名称：METHOD FOR RECOVERING A USED SLURRY发明人：Mitsugu ABE,Masamitsu Iiyama申请号：US12539862申请日：20090812
公开号：US20100163487A1公开日：20100701
专利附图：
摘要：Foreign substances which are not inherently contained in a polishing slurry areselectively separated and removed from a polishing slurry component comprised ofabrasives, a solvent and an additive which are inherently contained in the polishing slurry.
申请人：Mitsugu ABE,Masamitsu Iiyama
地址：Atsugi-shi JP,Atsugi-shi JP
国籍：JP,JP
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