Micromechanical component and method of manufactur

专利名称：Micromechanical component and method of

manufacturing a micromechanicalcomponent

发明人：Frank Fischer,Lars Metzger申请号：US10026177申请日：20011220

公开号：US20020096727A1公开日：20020725

专利附图：

摘要：A micromechanical component and method for its manufacture, in particular anacceleration sensor or a rotational speed sensor, includes: function components

suspended movably above a substrate; a first insulation layer provided above thesubstrate; a first micromechanical function layer including conductor regions providedabove the first insulation layer; a second insulation layer provided above the conductorregions and above the first insulation layer; a third insulation layer provided above thesecond insulation layer; a second micromechanical function layer including first andsecond trenches provided above the third insulation layer, the second trenches extendingto the third insulation layer above the conductor regions and the first trenches extendingto a cavity beneath the movably suspended function components in the secondmicromechanical function layer.

申请人：FISCHER FRANK,METZGER LARS

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