专利名称：APPARATUS FOR USE IN THE
MANUFACTURE OF SEMI-CONDUCTORDEVICES
发明人：FRANCIS LOUIS FARMER申请号：US3667661D申请日：19700408公开号：US3667661A公开日：19720606
摘要：When a semi-conductor slice is subjected to a manufacturing process to convertit to a plurality of semi-conductor components, it is then necessary to separate the semi-conductor components. The invention provides apparatus for doing this in which a pair ofresilient diaphragms are used to sandwich the wafer, the diaphragms then beingdistended to crack the slice along previously scribed lines.
申请人：FRANCIS LOUIS FARMER
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