专利名称：High frequency interconnect signal
transmission lines
发明人：Toshiki Hirano,Nobumasa
Nishiyama,Haruhide Takahashi
申请号：US11643269申请日：20061220公开号：US07804663B2公开日：20100928
专利附图：
摘要：A micro-electromechanical signal transmission line is made from an electricallyconductive material. It has a first distal end and a second distal end. The second distal
end is free to move with respect to said first distal end. There exists an unsupportedregion between the first distal end and the second distal end. The unsupported region isjuxtaposed at a controlled distance from at least one grounded conductive surface.
申请人：Toshiki Hirano,Nobumasa Nishiyama,Haruhide Takahashi
地址：San Jose CA US,Yokohama JP,Kanagawa JP
国籍：US,JP,JP
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