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Optical probe and method for manufacturing same an

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专利名称:Optical probe and method for

manufacturing same and scanning proximityfield optical microscope

发明人:Hiroshi Muramatsu,Katsunori Honma,Norio

Chiba,Noritake Yamamoto,Akira Egawa

申请号:US09378209申请日:19990819公开号:US030324B1公开日:20020806

专利附图:

摘要:A proximity field optical microscope is provided which can simultaneously

conduct optical observation in the ultraviolet and infrared light ranges and conductgeometrical observation and detect other physical information, wherein a microscopicopening is stably and easily formed in a probe tip with low manufacturing cost and highyield. The microscope has an optical probe which comprises a tube having a tip portionformed with a smaller diameter than an overall diameter of the tube, an optically opaquematerial coated on the tube, an optical microscope opening formed at the tip portion,and an optical waveguide having at least two optical end surfaces, one end surface beinginserted in the tube facing the microscopic opening.

申请人:SEIKO INSTRUMENTS INC.

代理机构:Adams & Wilks

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