专利名称:Techniques for making and using a sensing
assembly for a mass flow controller
发明人:Faramarz Azima申请号:US08/953715申请日:19971017公开号:US06062077A公开日:20000516
摘要:The present invention provides a technique for making a sensing assembly foruse in a mass flow controller. The technique includes providing separating terminalsbetween windings on a sensor tube. The separating terminals allow secure and reliableelectrical connections to be made to wire wound on the sensor tube, and act as standoffsthat support the sensor tube about an insulative form.
申请人:AZIMA; FARAMARZ
代理机构:Townsend and Townsend and Crew LLP
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