Film thickness measurement apparatus, film thickne

专利名称：Film thickness measurement apparatus, film

thickness measurement method, and non-transitory computer storage medium

发明人：Shuji Iwanaga,Tadashi Nishiyama,Kanzou

Katou

申请号：US146091申请日：20150417公开号：US0932B2公开日：20160531

专利附图：

摘要：Film thickness measured values obtained by measurement in advance at a

plurality of points on a measurement preparation substrate and coordinates

corresponding to the film thickness measured values are acquired. A pixel value at eachcoordinates is extracted from a preparation imaged image obtained by imaging themeasurement preparation substrate in advance by an imaging device. Correlation databetween the pixel value extracted at each coordinates and the film thickness measuredvalue at each coordinates is generated. A substrate being a film thickness measurementobject is imaged by the imaging device to acquire an imaged image, and a film thicknessof a film formed on the substrate being the film thickness measurement object iscalculated on the basis of a pixel value of the imaged image and the correlation data.

申请人：Tokyo Electron Limited

地址：Tokyo JP

国籍：JP

代理机构：Posz Law Group, PLC

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