专利名称:MANUFACTURING METHOD AND
MANUFACTURING DEVICE FOR ORGANIC ELELEMENTS
发明人:KAKIUCHI, RYOHEI,YAMAMOTO, SATORU申请号:EP13760732申请日:20130307公开号:EP2827682A4公开日:20151007
摘要:The invention allows evaporation materials discharged from evaporationsources to deposit on a substrate with a desired pattern, while eliminating the need forthe conventional strip-shaped shadow mask, and enables correction of the effects due tothe substrate being displaced during conveyance. In the apparatus for manufacturing anorganic EL device, a first drive section rotates a roller at a specific rotational speed,thereby conveying the substrate that is in contact with the roller. This apparatusperforms deposition of evaporation materials discharged from evaporation sources onthe substrate with such conveyance. In this apparatus, a shielding section is driven by asecond drive section so as to pivot around an axis of the roller at a specific pivot speed,thereby shielding and unshielding the substrate. The second drive section changes thepivot speed of the shielding section so that it is different from the rotational speed ofthe roller.
申请人:NITTO DENKO CORPORATION
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