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A SEALING STRUCTURE AND A METHOD OF MANUFACTURING

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专利名称:A SEALING STRUCTURE AND A METHOD OF

MANUFACTURING THE SAME

发明人:DONKERS, Johannes,HIJZEN,

Erwin,MEUNIER-BEILLARD, Philippe,KOOPS,Gerhard

申请号:EP078491.5申请日:20071115公开号:EP2094602A2公开日:20090902

摘要:A method of manufacturing a structure (1100), the method comprising forminga cap element (401) on a substrate (101), removing material (103) of the substrate (101)below the cap element (401) to thereby form a gap (802) between the cap element (401)and the substrate (101), and rearranging material of the cap element (401) and/or of thesubstrate (101) to thereby merge the cap element (401) and the substrate (101) tobridge the gap (802).

申请人:NXP B.V.

地址:High Tech Campus 60 5656 AG Eindhoven NL

国籍:NL

代理机构:Röggla, Harald

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