专利名称：Apparatus and method for observing
sample
发明人：山本 諭,松原 正典,杉山 範和申请号：JP2018197569申请日：20181019公开号：JP6754408B2公开日：20200909
摘要：To provide a sample observation device and a sample observation method thatimprove throughput until observation image data is obtained.SOLUTION: A sampleobservation device 1 comprises: an irradiation optical system 3 that irradiates a sample Swith planar light L2; a scanning part 4 that scans the sample S with respect to a surface Rirradiated with the planar light L2; an image formation optical system 5 that has anobservation axis P2 inclined with respect to the irradiated surface R and forms
observation light L3 into an image, the observation light generated from the sample Sthrough the irradiation with the planar light L2; an image acquisition part 6 that acquires aplurality of pieces of partial image data corresponding to part of an optical imageformed from the observation light L3 by the image formation optical system 5; and animage creation part 8 that creates observation image data of the sample S on the basis ofthe plurality of pieces of partial image data created by the image acquisition part6.SELECTED DRAWING: Figure 1
申请人：浜松ホトニクス株式会社
地址：静岡県浜松市東区市野町１１２６番地の１
国籍：JP
代理人：長谷川 芳樹,黒木 義樹,柴山 健一,中山 浩光
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容