Arc vacuum pump

专利名称：Arc vacuum pump

发明人：NITZAN ELIYAHU,ALEKSANDER

ARENSHTAM,EFIM BENDER

申请号：AU2003207957申请日：20030114公开号：AU2003207957A8公开日：20030724

摘要：An arc vacuum pump which includes a housing, a getter material source, and aplurality of Penning discharge cells. Each Penning cell includes: an anode made of non-ferromagnetic material, a plurality of cathodes of which at least a first cathode has atleast one orifice, the orifice dimensioned to channel entering getter material within theelectron layer of the cell so that the plasma does not reach the anode. The first cathodeis made of a magnetically conductive material. The cell also includes a magnet positionedoutside of the housing, proximate to a second cathode. The second cathode is part of thehousing wall. A magnet conductor is positioned outside the housing proximate to themagnet and in magnetic communication with the first cathode thereby forming aconfining magnetic system with the first cathode and the magnet for confining thedischarge of the cell.

申请人：VARCO LTD.

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