专利名称：VACUUM PROCESSING SYSTEM发明人：Kengo Ashizawa申请号：US12816750申请日：20100616
公开号：US20100256809A1公开日：20101007
专利附图：
摘要：A vacuum processing system includes a transfer chamber configured to form avacuum atmosphere through which a target object is transferred. A transfer mechanism isdisposed in the transfer chamber and configured to transfer the target object. A processchamber is connected to the transfer chamber through a first gate valve and configured
to perform a process on the target object within a vacuum atmosphere. A first exhaustport is formed in a bottom of the transfer chamber at the foot of the first gate valve. Afirst gas exhaust section is connected to the first exhaust port and configured to exhaustgas inside the transfer chamber.
申请人：Kengo Ashizawa
地址：Nirasaki-shi JP
国籍：JP
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