专利名称：Particle-optical arrangements and particle-optical systems
发明人：Dirk Preikszas,Michael Steigerwald申请号：US10634810申请日：20030806
公开号：US20040075053A1公开日：20040422
专利附图：
摘要：There are disclosed particle-optical beam splitters providing at least threebeam-manipulating regions having magnetic fields of different field strengths providedtherein for at least one particle beam passing the beam splitter. The beam splitter is, in
first order, free of dispersion, astigmatism and distortion.
申请人：LEO ELEKTRONENMIKROSKOPIE GMBH
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