专利名称：METHOD OF ALIGNING AN OPTICAL
SYSTEM
发明人：FREIMANN, Rolf,WAGEMANN, Ulrich申请号：EP06743035.5申请日：20060523公开号：EP1987390A1公开日：20081105
摘要：A method of manufacturing an optical system having plural optical elementsmounted relative to each other on a mounting structure of the optical system comprisesdisposing the optical system in a beam path of an interferometer apparatus having aninterferometer optics and a selectable hologram for shaping a beam of measuring lightto be incident on surfaces of the optical elements of the optical system; selecting a firsthologram of the interferometer apparatus and recording at least one first interferencepattern generated by measuring light reflected from a surface of a first optical element;selecting a second hologram of the interferometer apparatus, wherein the secondhologram is different from the first hologram, and recording at least one secondinterference pattern generated by measuring light reflected from a surface of a secondoptical element, which is different from the first optical element; and adjusting a positionof the first optical element relative to the second optical element on the mountingstructure based upon the first interference pattern and the second interference pattern.
申请人：Carl Zeiss SMT AG
地址：Rudolf-Eber-Strasse 2 73447 Oberkochen DE
国籍：DE
代理机构：Schorr, Frank Jürgen
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