专利名称：Methods of manufacturing a magnetic field
sensor
发明人：Renu Whig,Phillip Mather,Kenneth
Smith,Sanjeev Aggarwal,JonSlaughter,Nicholas Rizzo
申请号：US15142721申请日：20160429公开号：US09525129B2公开日：20161220
专利附图：
摘要：A semiconductor process integrates three bridge circuits, each include
magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense amagnetic field in three orthogonal directions. The process includes various depositionand etch steps forming the magnetoresistive sensors and a plurality of flux guides onone of the three bridge circuits for transferring a “Z” axis magnetic field onto sensorsorientated in the XY plane.
申请人：EVERSPIN TECHNOLOGIES, INC.
地址：Chandler AZ US
国籍：US
代理机构：Bookoff McAndrews, PLLC
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