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DIFFRACTOMETRY-BASED ANALYSIS METHOD AND ASSOCIATE

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专利名称:DIFFRACTOMETRY-BASED ANALYSIS

METHOD AND ASSOCIATEDDIFFRACTOMETER, PARTICULARLYSUITABLE FOR SAMPLES COMPRISINGMULTIPLE LAYERS OF MATERIALS

发明人:GHAMMRAOUI, BAHAA,PAULUS,

CAROLINE,TABARY, JOACHIM

申请号:EP13831828.2申请日:20130919公开号:EP2898315A2公开日:20150729

摘要:A method and device that analyzes a sample with a diffractometer that includesa collimated source, a spectrometric detector, and a detection collimator. The sample isirradiated with an incident beam and the detector has a detection plane with multiplephysical or virtual pixels. An measured energy spectrum is established for each pixel andeach measured energy spectrum is readjusted. The spectrum is expressed as a functionof a variable that accounts for the energy of the scattered radiation and an angle ofdiffraction. The fulfillment of at least one multiple material criterion is verified. Groups ofpixels are formed using the results of the verification step, each group corresponding toa layer of material and different groups corresponding to different layers of material,and the spectra are combined by group, during which, for each group, the readjustedspectra for the pixels of the group are combined.

申请人:COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES

地址:Bâtiment \"Le Ponant D\" 25, rue Leblanc 75015 Paris FR

国籍:FR

代理机构:Santarelli

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