Variable capacitance capacitor

专利名称：Variable capacitance capacitor发明人：Depetro, Riccardo,Manzini, Stefano申请号：EP01830595.3申请日：20010920公开号：EP1296380A1公开日：20030326

专利附图：

摘要：High-Q, variable capacitance capacitor (20, 20'), comprising a pocket (22) ofsemiconductor material; a field insulating layer (23), covering the pocket; an opening (24)in the field insulating layer, delimiting a first active area (24); an access region (25) formedin the active area and extending at a distance from a first edge (24a) of the active area

and adjacent to a second edge (24b) of the active area. A portion (26) of the pocket (22) iscomprised between the access region (15) and the first edge (24a) and forms a firstarmature; an insulating region (30) extends above the portion (26) of said body, and apolysilicon region (31) extends above the insulating region (30) and forms a secondarmature. A portion of the polysilicon region extends above the field insulating layer (23),parallel to the access region (25); a plurality of contacts (32) are formed at a mutualdistance along the portion of the polysilicon region (31) extending above the fieldinsulating layer (23).

申请人：STMicroelectronics S.r.l.

地址：Via C. Olivetti, 2 20041 Agrate Brianza (Milano) IT

国籍：IT

代理机构：Cerbaro, Elena, Dr.

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